Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon

doi:10.1063/1.4997615

	Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon
	Liu, Ruiqiang1,2 ; Liu, Yue 1; Jia, Wenzhu 1; Zhou, Yanwen 3
	2017-08-01
发表期刊	PHYSICS OF PLASMAS
ISSN	1070-664X
EISSN	1089-7674
卷号	24 期号:8
摘要	Based on the drift-diffusive approximation, one-dimensional fluid modeling is carried out for the pulsed RF capacitive glow discharges in low pressure argon. Investigated are the effects of various discharge parameters, such as the duty cycle ratio and frequency of the pulsed modulation, and the material properties of the electrode, on the plasma characteristics such as the electron recombination rate, during both the initial and the steady state phases of the discharge. The modeling results show that, after switching off the applied voltage during the pulsed modulation of the RF discharge, the electron density increases first and then decreases. This phenomenon is particularly pronounced before the discharge reaches steady state. Meanwhile, independent of whether the discharge has reached steady state or not, right after the applied voltage is switched on during each modulation period, the electron and ion densities and the metastable argon atom density, as well as their generation rate, experience a time delay (phase lag) with respect to the applied voltage. The results also show that, at the initial phase of the pulsed modulation, during the steady state discharge, the electron temperature in the center of the bulk plasma is almost not affected by the applied voltage, or by the material properties of the electrode such as the secondary electron emission rate. The electron density, however, does increase with these parameters, resulting in increased power density dissipation of the plasma. On the other hand, at fixed applied voltage, the central electron temperature of the bulk plasma is reduced by increasing several parameters, including the modulation duty ratio, the distance between two electrodes, and the modulation frequency, as well as the electron recombination rate due to different choices of the electrode material. This eventually leads to a reduction of the dissipated power density in the plasma. In particular, with the increase of the modulation duty ratio, the distance between electrodes, or the RF modulation frequency, the electron temperature decays slower after switching off the applied voltage within the modulation period. All the above studies are also accompanied by a systematic investigation of the temporal and spatial distributions of the electron energy conversion during the pulsed RF discharge. © 2017 Author(s).
关键词	Argon Dynamics Electrodes Electron density measurement Electron energy levels Electrons Energy conversion Frequency modulation Glow discharges Plasma diagnostics Secondary emission Discharge parameters Electron and ion densities Electron recombinations Modulation frequencies One-dimensional fluid model Plasma characteristics Secondary electron emissions Temporal and spatial distribution
DOI	10.1063/1.4997615
收录类别	EI ; SCIE
语种	英语
WOS研究方向	Physics
WOS类目	Physics, Fluids & Plasmas
WOS记录号	WOS:000409232200099
出版者	American Institute of Physics Inc.
EI入藏号	20173604130462
EI分类号	525.5 Energy Conversion Issues ; 701.1 Electricity: Basic Concepts and Phenomena ; 804 Chemical Products Generally ; 932.3 Plasma Physics
原始文献类型	Journal article (JA)
出版地	MELVILLE
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	https://ir.cqcet.edu.cn/handle/39TD4454/3090
专题	电子与物联网学院
作者单位	1.Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian; 116024, China; 2.College of Applied Electronics, Chongqing College of Electronic Engineering, Chongqing; 401331, China; 3.School of Materials and Metallurgy, University of Science and Technology Liaoning, Anshan; 114051, China
第一作者单位	重庆电子科技职业大学
推荐引用方式 GB/T 7714	Liu, Ruiqiang,Liu, Yue,Jia, Wenzhu,et al. Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon[J]. PHYSICS OF PLASMAS,2017,24(8).
APA	Liu, Ruiqiang,Liu, Yue,Jia, Wenzhu,&Zhou, Yanwen.(2017).Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon.PHYSICS OF PLASMAS,24(8).
MLA	Liu, Ruiqiang,et al."Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon".PHYSICS OF PLASMAS 24.8(2017).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Liu-2017-Fluid model（2609KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载